Products

Dry Type Exhaust Gas Treatment System

Dry Type Reo

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Our important model that achieved cost reduction and high safety



【Applications】

For gas treatment emitted from CVD process, ion implantation and epitaxial process

【Features】

  • Highest grade model of dry type exhaust gas treatment system
    Our best-selling product that has all the control functions to keep production equipment running smoothly and allows for long-term processing.
  • Abatement column tank swap replacement system
    No regeneration waiting time of abatement column tank by using our proprietary tank.
    For tank deterioration, we will repair and replace it at our expense.
  • Cost reduction for self-manufacture catalyst
    By developing catalyst and producing them in our company, the cost of catalyst was reduced to 1/3 to 1/10 of the conventional cost.
    We also improved the production system for the tank, restructured the industrial waste storage facilities and improved the work equipment.
    Therefore, a 20% reduction in industrial waste costs and a 30% reduction in refilling time were realized.
    Compared to other companies’ products, price/ performance ratio is now unbeatable.

【Process Gases】

  • SiF4、PH3、B2H6、TEOS、Si2H6 etc.