Exhaust Gas Treatment System
Category
Dry Type Exhaust Gas Treatment System
Purpose
Heater + Wet Type Exhaust Gas Treatment System
We have realized phenomenal performance by excluding CF4 gas from the treatment.
PurposeTreatment of process gas and PFC gas used in LP and PE-CVD
Plasma Type Exhaust Gas Treatment System
We have realized persistent PFC gas treatment.
PurposeTreatment of process gas used in OXIDE-ETCH and PFC gas such as CF4, SF6
Wet Type Exhaust Gas Treatment System
We have realized space saving, low cost and high maintenance.
PurposeTreatment of halogen gas, ammonia gas used in dry etch process and CVD process
