Amazing space saving. Outstanding maintenance.

【Applications】

For water-soluble gases and ammonia gases treatment used in dry etching process and CVD process as well as powder removal

【Features】

• By fundamentally reviewing the wet scrubber of conventional wet type exhaust gas treatment system and simplifying the structure as much as possible. Aqua IV is lightweight, easily removable and has achieved as initial cost of 1/2 and a space saving of nearly the size of A3 paper.
• A wide variety of combinations with dry abatement cylinder or connected in series or parallel are available.

【Process Gases】

Aqua IV (MAX300L/min) : HBr・HF・NH3・HCl・BCl3・etc