Heater + Wet Type Exhaust Gas Treatment System
Category
Heater + Wet Type Sirius Kaiser Oz
World’s first safety heater type with spiral mechanism
【Applications】
For PFC gas and process gas used in PE-CVD
【Features】
- Sirius Kaiser series with low initial cost
| Sirius Kaiser Series Advantage | Superior Point | |
| Maintenance Performance | Easy maintenance using special tools | Heater/ wet scrubber is independent and detachable |
| Maintenance Cycle | Improved corrosion resistance through repeated studies of component base materials and optimization of coatings | Maximize component wear due to corrosion |
| Heater | Increased heat transfer efficiency by air flow occurred by special filling anti-corrosion materials | Treatment efficiency improvement and energy saving |
| Adopted special alloy of corrosion-resistant materials | Extended heater unit life-time | |
| Adopted CAC System (Clean Technology Anti-Corrosion System) | Improved corrosion resistance | |
| Wet Scrubber | Adoption of special shower nozzles and effective use of circulating water |
Temperature rise rate 40 minutes (room temperature ~800℃) Cooling speed 120 minutes (maintenance available temperature) Water and space saving |
