World’s first long ark plasma. Easy maintenance by replacing the unit.

【Applications】

For process gas and PFC gas eliminated by etching system

	Thunder Advantage	Superior Point
Maintenance Performance	Plasma reactor is small-size, easy maintenance with clamp connection	Units are independent and detachable
Plasma Unit	Achieved high treatment efficiency with minimum energy (reactor inner atmosphere average 6000℃) due to our long ark plasma technology	Treatment efficiency improvement
	MAX 2 reactor installation available in the same dimension	Backup line installation available. Ignition treatment available with no time lag.
	Plasma can be turned on only during treatment gas inflow	Reduced component wear and energy consumption
Shower Area	Large wet scrubber will be unnecessary due to water consumption optimization	Low running cost
SEMI Standards	Certified	Safety improvement